Buri gihe dutekereza kandi twimenyereza ihuye nibitekerezo, no gukura. Dufite intego yo kugera kubitekerezo n'umubiri bikize hamwe nabazima ku bushinwa bwo mu rwego rwo hejuru 99.9% ~ 99.999% byahagaritswe, ibicuruzwa byacu bikoreshwa cyane muri iyi nganda n'izindi nganda.
Buri gihe dutekereza kandi twimenyereza ihuye nibitekerezo, no gukura. Dufite intego yo kugera kubitekerezo n'umubiri bikize hamwe nabazima kuriGaze ya karubone tetrafluoride, Gaze ya CF4, Nkuburyo bwo gukoresha ibikoresho kuri amakuru yagura mubucuruzi mpuzamahanga, twishimiye kwiteza imbere ahantu hose kurubuga no kumurongo. Nubwo serivisi nziza nziza turaguha, serivisi yo kugisha inama ingirakamaro kandi ishimishije itangwa nitsinda ryacu ryujuje ibyangombwa nyuma yo kugurisha. Urutonde rwibintu hamwe nubujyakuzimu hamwe nandi makuru yose ushinzwe kuboherereza ku gihe kubibazo. Ugomba rero guhuza natwe utwoherereza imeri cyangwa kuduhamagara mugihe ufite ikibazo kijyanye nishirahamwe ryacu. OU irashobora kandi kubona amakuru ya aderesi kurubuga rwacu hanyuma tuze mumutwe. Twabonye ubushakashatsi bwumurima mubicuruzwa byacu. Twizeye ko tugiye gusangira ibikorwa byo kugeraho no gukora umubano ushikamye na bagenzi bacu muriki gice cyisoko. Turashaka kubaza ibibazo byawe.
Ibisobanuro | 99.999% |
Ogisijeni + argon | ≤1ppm |
Azote | Ppm |
Ubushuhe (H2O) | Ppm |
HF | ≤0.1 ppm |
CO | ≤0.1 ppm |
CO2 | Ppm |
Sf6 | Ppm |
Halocarbynes | Ppm |
Umwanda wose | Ppm |
Carbone tetrafluoride ni hydrocarbon ya Halokarbon hamwe na chimique cf4. Irashobora gufatwa nki hydrocarbon ya Halocarbon ya Halogarbon, Hagatine, Perfluocarbocarbon, cyangwa nkikibazo cyihangana. Carbone tetrafluide ni gaze itagira ibara na odor idafite ibara, idashobora gusohora mumazi, gushonga muri benzene na chloroform. Bikaze munsi yubushyuhe busanzwe nigitutu, irinde ibimama bikomeye, ibikoresho byaka cyangwa byaka. Gazi idashobora gutwika, igitutu cy'imbere cya kontineri kiziyongera iyo cyagaragaye ku bushyuhe bwinshi, kandi hari akaga ko guca urusango no guturika. Ni imiti kandi idaka umuriro. Gusa amazi ya Amonia-sodium yicyuma irashobora gukora mubushyuhe bwicyumba. Carbone tetrafluoride ni gaze itera ingaruka zo muri parike. Birahamye cyane, birashobora kuguma mukirere igihe kirekire, kandi ni gaze ikomeye cyane. Carbone Tetrafluoride ikoreshwa mubikorwa bya plasma byerekana imirongo itandukanye ihuriweho. Irakoreshwa kandi na gaze ya laser, kandi ikoreshwa mubushyuhe buke-buke, ibishishwa, amavuta, ibikoresho, hamwe nibikoresho byatewe na infrared. Nibikoresho byakoreshejwe cyane bya plasma muburyo bwa microelekronics. Ni uruvange rwa TetrafluoRohathamethanethamethathathathathanehathane gaze ndende-isukuye ogisijeni ndende. Birashobora gukoreshwa cyane muri Silicon, Silicon Dioxyde, Silicon Nitride, hamwe nikirahure cya fosifori. IThone y'ibikoresho bya filime binanutse nka Tungsten kandi bikoreshwa cyane mu isuku y'ibikoresho bya elegitoroniki, Ikoranabuhanga rya Larse, ubuhanga bwa Laser, ubugenzuzi buke, no gutakaza ubushyuhe mu musaruro wumuzunguruko. Ikoreshwa nkubwonko buke-ubushyuhe hamwe na plasma yubuhanga bwumutse bwo guhagarika imirongo ihuriweho. Gucunga ububiko: Ububiko mu bubiko bukonje, buhumeka budahwitse. Irinde inkomoko yumuriro nubushyuhe. Ubushyuhe bwo kubika butagomba kurenga 30 ° C. Igomba kubikwa ukundi kuva byoroshye (gutwikwa) gutwika no kuri oxidants, kandi irinde kubika bivanze. Agace k'ububiko kagomba kuba gifite ibikoresho byo kwivuza byihutirwa.
Firi muri firigo:
Tetrafluoromethathane rimwe na rimwe ikoreshwa nkubwonko buke.
ETCHING:
Ikoreshwa muri microfronics yonyine cyangwa ihujwe na ogisijeni nka plasma etchant kuri silicon, dioxyde delicon, na Nitride ya Silicon.
Ibicuruzwa | Carbone Tetrafluoride CF4 | ||
Ingano ya paki | 40ltr silinder | 50ltr silinder | |
Kuzuza ibiro byuburemere / cyl | 30kgs | 38Kgs | |
Qty yishyuwe muri 20' | 250 cyls | 250 cyls | |
Uburemere bwiza | Toni 7.5 | Toni 9.5 | |
Cylinder tare uburemere | 50kgs | 55Kgs | |
Valve | Cga 580 |
①Ukuri, Ikigo gishya;
Uruganda rukora icyemezo cya ②iso;
Kubyara;
Sisitemu yo gusesengura ④on-umurongo kugirango igenzure ubuziranenge muri buri ntambwe;
⑤ugh Icyitonderwa nuburyo bwitondewe bwo gukora silinderi mbere yo kuzuza;Buri gihe dutekereza kandi twimenyereza ihuye nibitekerezo, no gukura. Dufite intego yo kugera kubitekerezo n'umubiri bikize hamwe nabazima ku bushinwa bwo mu rwego rwo hejuru 99.9% ~ 99.999% byahagaritswe, ibicuruzwa byacu bikoreshwa cyane muri iyi nganda n'izindi nganda.
100% UmwimerereGaze ya CF4, Gaze ya karubone tetrafluoride, Nkuburyo bwo gukoresha ibikoresho kuri amakuru yagura mubucuruzi mpuzamahanga, twishimiye kwiteza imbere ahantu hose kurubuga no kumurongo. Nubwo serivisi nziza nziza turaguha, serivisi yo kugisha inama ingirakamaro kandi ishimishije itangwa nitsinda ryacu ryujuje ibyangombwa nyuma yo kugurisha. Urutonde rwibintu hamwe nubujyakuzimu hamwe nandi makuru yose ushinzwe kuboherereza ku gihe kubibazo. Ugomba rero guhuza natwe utwoherereza imeri cyangwa kuduhamagara mugihe ufite ikibazo kijyanye nishirahamwe ryacu. OU irashobora kandi kubona amakuru ya aderesi kurubuga rwacu hanyuma tuze mumutwe. Twabonye ubushakashatsi bwumurima mubicuruzwa byacu. Twizeye ko tugiye gusangira ibikorwa byo kugeraho no gukora umubano ushikamye na bagenzi bacu muriki gice cyisoko. Turashaka kubaza ibibazo byawe.