Mu myaka mike ishize, ubucuruzi bwacu bwakuweho kandi bucukuzi-ubuhanzi-buhanzi buhanzi bombi murugo no mumahanga. Hagati aho, abakozi bacu b'inzego itsinda ry'impuguke bihaye iterambere ryanyu ryo kugurisha neza igiciro cyiza CF4 Igiciro cya gaze ya gaze, kubona yemera! Turakaze tubikuye ku mutima ibyiringiro bishya mu mahanga kugira ngo dushyireho imikoranire y'isosiyete kandi dutegereje gushimangira imikoranire n'abakiriya bose bashize.
Mu myaka mike ishize, ubucuruzi bwacu bwakuweho kandi bucukuzi-ubuhanzi-buhanzi buhanzi bombi murugo no mumahanga. Hagati aho, abakozi bacu bashikamye itsinda ryimpuguke bitangiye iterambere ryaweGaze ya karubone tetrafluoride, Gaze ya CF4, Kunyurwa nabakiriya buri gihe ni ugushaka, gushiraho agaciro kubakiriya buri gihe ni inshingano zacu, manda ndende-yubucuruzi nicyo dukora. Twabaye umufatanyabikorwa wizewe rwose mubibazo byawe mubushinwa. Birumvikana ko izindi serivisi, nko kugisha inama, nazo zishobora gutangwa.
Ibisobanuro | 99.999% |
Ogisijeni + argon | ≤1ppm |
Azote | Ppm |
Ubushuhe (H2O) | Ppm |
HF | ≤0.1 ppm |
CO | ≤0.1 ppm |
CO2 | Ppm |
Sf6 | Ppm |
Halocarbynes | Ppm |
Umwanda wose | Ppm |
Carbone tetrafluoride ni hydrocarbon ya Halokarbon hamwe na chimique cf4. Irashobora gufatwa nki hydrocarbon ya Halocarbon ya Halogarbon, Hagatine, Perfluocarbocarbon, cyangwa nkikibazo cyihangana. Carbone tetrafluide ni gaze itagira ibara na odor idafite ibara, idashobora gusohora mumazi, gushonga muri benzene na chloroform. Bikaze munsi yubushyuhe busanzwe nigitutu, irinde ibimama bikomeye, ibikoresho byaka cyangwa byaka. Gazi idashobora gutwika, igitutu cy'imbere cya kontineri kiziyongera iyo cyagaragaye ku bushyuhe bwinshi, kandi hari akaga ko guca urusango no guturika. Ni imiti kandi idaka umuriro. Gusa amazi ya Amonia-sodium yicyuma irashobora gukora mubushyuhe bwicyumba. Carbone tetrafluoride ni gaze itera ingaruka zo muri parike. Birahamye cyane, birashobora kuguma mukirere igihe kirekire, kandi ni gaze ikomeye cyane. Carbone Tetrafluoride ikoreshwa mubikorwa bya plasma byerekana imirongo itandukanye ihuriweho. Irakoreshwa kandi na gaze ya laser, kandi ikoreshwa mubushyuhe buke-buke, ibishishwa, amavuta, ibikoresho, hamwe nibikoresho byatewe na infrared. Nibikoresho byakoreshejwe cyane bya plasma muburyo bwa microelekronics. Ni uruvange rwa TetrafluoRohathamethanethamethathathathathanehathane gaze ndende-isukuye ogisijeni ndende. Birashobora gukoreshwa cyane muri Silicon, Silicon Dioxyde, Silicon Nitride, hamwe nikirahure cya fosifori. IThone y'ibikoresho bya filime binanutse nka Tungsten kandi bikoreshwa cyane mu isuku y'ibikoresho bya elegitoroniki, Ikoranabuhanga rya Larse, ubuhanga bwa Laser, ubugenzuzi buke, no gutakaza ubushyuhe mu musaruro wumuzunguruko. Ikoreshwa nkubwonko buke-ubushyuhe hamwe na plasma yubuhanga bwumutse bwo guhagarika imirongo ihuriweho. Gucunga ububiko: Ububiko mu bubiko bukonje, buhumeka budahwitse. Irinde inkomoko yumuriro nubushyuhe. Ubushyuhe bwo kubika butagomba kurenga 30 ° C. Igomba kubikwa ukundi kuva byoroshye (gutwikwa) gutwika no kuri oxidants, kandi irinde kubika bivanze. Agace k'ububiko kagomba kuba gifite ibikoresho byo kwivuza byihutirwa.
Firi muri firigo:
Tetrafluoromethathane rimwe na rimwe ikoreshwa nkubwonko buke.
ETCHING:
Ikoreshwa muri microfronics yonyine cyangwa ihujwe na ogisijeni nka plasma etchant kuri silicon, dioxyde delicon, na Nitride ya Silicon.
Ibicuruzwa | Carbone Tetrafluoride CF4 | ||
Ingano ya paki | 40ltr silinder | 50ltr silinder | |
Kuzuza ibiro byuburemere / cyl | 30kgs | 38Kgs | |
Qty yishyuwe muri 20' | 250 cyls | 250 cyls | |
Uburemere bwiza | Toni 7.5 | Toni 9.5 | |
Cylinder tare uburemere | 50kgs | 55Kgs | |
Valve | Cga 580 |
①Ukuri, Ikigo gishya;
Uruganda rukora icyemezo cya ②iso;
Kubyara;
Sisitemu yo gusesengura ④on-umurongo kugirango igenzure ubuziranenge muri buri ntambwe;
⑤ugh Icyitonderwa nuburyo bwitondewe bwo gukora silinderi mbere yo kuzuza;Mu myaka mike ishize, ubucuruzi bwacu bwakuweho kandi bucukuzi-ubuhanzi-buhanzi buhanzi bombi murugo no mumahanga. Hagati aho, abakozi bacu b'inzego itsinda ry'impuguke bihaye iterambere ryanyu ryo kugurisha neza igiciro cyiza CF4 Igiciro cya gaze ya gaze, kubona yemera! Turakaze tubikuye ku mutima ibyiringiro bishya mu mahanga kugira ngo dushyireho imikoranire y'isosiyete kandi dutegereje gushimangira imikoranire n'abakiriya bose bashize.
Kugurisha nezaGaze ya CF4, Gaze ya karubone tetrafluoride, Kunyurwa nabakiriya buri gihe ni ugushaka, gushiraho agaciro kubakiriya buri gihe ni inshingano zacu, manda ndende-yubucuruzi nicyo dukora. Twabaye umufatanyabikorwa wizewe rwose mubibazo byawe mubushinwa. Birumvikana ko izindi serivisi, nko kugisha inama, nazo zishobora gutangwa.