Boron trichloride (BCl3)ni organic organique ikunze gukoreshwa mugukama kwumye no gutumura imyuka ya chimique (CVD) mubikorwa bya semiconductor. Ni gazi itagira ibara ifite impumuro ikomeye mubushyuhe bwicyumba kandi yunvikana numwuka mwinshi kuko hydrolyzes itanga aside hydrochloric na aside boric.

Porogaramu ya Boron Trichloride

Mu nganda ziciriritse,Boron trichlorideikoreshwa cyane muburyo bwumye bwa aluminium kandi nka dopant kugirango ikore uturere twa P kuri wafer ya silicon. Irashobora kandi gukoreshwa mugukora ibikoresho nka GaAs, Si, AlN, kandi nkisoko ya boron mubikorwa bimwe byihariye. Byongeye kandi, Boron trichloride ikoreshwa cyane mugutunganya ibyuma, inganda zikirahure, gusesengura imiti nubushakashatsi bwa laboratoire.

Umutekano wa Boron Trichloride

Boron trichlorideni ruswa kandi ifite uburozi kandi irashobora kwangiza bikomeye amaso nuruhu. Ihindura hydrolyzes mu kirere cyuzuye kugirango irekure gaze ya hydrogène ya chloride. Kubwibyo, ingamba zikwiye zumutekano zigomba gufatwa mugihe gikemuweBoron trichloride, harimo kwambara imyenda ikingira, amadarubindi n'ibikoresho byo kurinda ubuhumekero, no gukorera ahantu hafite umwuka mwiza.