Epitaxial (ikura)Ga zivanzes

Mu nganda za semiconductor, gaze ikoreshwa mu gukura urwego rumwe cyangwa nyinshi z'ibikoresho binyuze mu gushyira umwuka wa shimi ku kintu cyatoranijwe neza yitwa gaze ya epitaxial.

Imyuka ikunze gukoreshwa ya silicon epitaxial irimo dichlorosilane, silicon tetrachloride nasilaneIkoreshwa cyane cyane mu gushyira silicon epitaxial, gushyira silicon oxide film, gushyira silicon nitride film, gushyira silicon film amorphous ku turemangingo tw'izuba n'izindi photoreceptors, nibindi. Epitaxy ni inzira aho ikintu kimwe cya kristu gishyirwa ku buso bw'ubutaka.

Gukuraho umwuka uvangiye mu byuma (CVD)

CVD ni uburyo bwo gushyira ibintu bimwe na bimwe n'ibinyabutabire hakoreshejwe uburyo bwa gazi hakoreshejwe uburyo bwa gazi, ni ukuvuga uburyo bwo gukora filime hakoreshejwe uburyo bwa gazi. Bitewe n'ubwoko bwa filime, gazi ya CVD ikoreshwa na yo iratandukanye.

Gukoresha imiti igabanya ubukanaGazi ivanze

Mu gukora ibikoresho bya semiconductor na circuits zivanze, imyanda imwe n'imwe ishyirwa mu bikoresho bya semiconductor kugira ngo ibikoresho bihabwe ubwoko bw'uburyo bwo gutwara ibintu bukenewe n'uburyo bwo kwirinda gukora resistor, PN junctions, inkingi zitwikiriwe, nibindi. Gazi ikoreshwa mu gikorwa cyo gukoresha doping yitwa doping gaz.

Ahanini harimo arsine, fosfini, fosforu trifluoride, fosforu pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, diborane, n'ibindi.

Ubusanzwe, isoko ya doping ivangwa na gaze itwara ibintu (nka argon na azote) mu kabati k'isoko. Nyuma yo kuvanga, gazi ikomeza gushyirwa mu itanura rikwirakwira kandi ikazenguruka wafer, igashyira ibintu ku buso bwa wafer, hanyuma igakorana na silicon kugira ngo ikore ibyuma bya doping byimuka bikajya muri silicon.

GushushanyaUruvange rwa Gazi

Gukata ni ugukata ubuso butunganywa (nk'icyuma, silicon oxide, nibindi) ku gice cy'ubutaka nta gukaraba fotoresisti, ariko ugakingira agace ukoresheje photoresisti ...

Uburyo bwo gukata burimo gukata ibinyabutabire bitose n'uburyo bwo gukata ibinyabutabire byumye. Imyuka ikoreshwa mu gukata ibinyabutabire byumye yitwa gaze yo gukata.

Imyuka isya ubusanzwe ni imyuka ya fluoride (halide), urugero nkatetrafluoride karubone, azote trifluoride, trifluoromethane, hexafluoroethane, perfluoropropane, n'ibindi.