Epitaxial (gukura)Kuvanga Gas

Mu nganda za semiconductor, gaze ikoreshwa mu gukura igice kimwe cyangwa byinshi byibikoresho byatewe no guhumeka imyuka kuri substrate yatoranijwe neza yitwa gaze epitaxial.

Imyuka ikoreshwa cyane ya silicon epitaxial irimo dichlorosilane, silicon tetrachloride nasilane. Ahanini ikoreshwa mububiko bwa epitaxial silicon, kubika firime ya silicon oxyde, gushira nitride ya silicon nitride, gushira amorphous silicon firime ya selile yizuba hamwe nizindi fotorepteptor, nibindi. Epitaxy nuburyo bukoreshwa mubintu bimwe bya kirisiti bibikwa kandi bigakura hejuru yubutaka.

Imyuka ya Shimi (CVD) Gazi ivanze

CVD ni uburyo bwo kubitsa ibintu bimwe na bimwe hamwe na gazi ya fonctionnement ya gazi ikoresheje ibinyabuzima bihindagurika, ni ukuvuga uburyo bwo gukora firime ukoresheje gaze ya gaze ya reaction. Ukurikije ubwoko bwa firime yakozwe, gaze ya chimique yoherejwe (CVD) gaze nayo iratandukanye.

DopingGazi ivanze

Mu gukora ibikoresho bya semiconductor hamwe na sisitemu ihuriweho, umwanda runaka ushyirwa mubikoresho bya semiconductor kugirango utange ibikoresho ubwoko bwimikorere isabwa hamwe nuburwanya runaka bwo gukora rezistoriste, ihuriro rya PN, ibice byashyinguwe, nibindi. Gazi ikoreshwa mugikorwa cya doping yitwa gaze ya doping.

Ahanini harimo arsine, fosifine, fosifori trifluoride, fosifore pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, diborane, nibindi

Mubisanzwe, isoko ya doping ivangwa na gaze itwara (nka argon na azote) muri guverenema yinkomoko. Nyuma yo kuvanga, gazi itemba ikomeza kwinjizwa mumatanura ya diffuzione hanyuma ikazenguruka wafer, igashyira dopants hejuru ya wafer, hanyuma igakora hamwe na silikoni kugirango ikore ibyuma bifatanye byimukira muri silikoni.

KuryaUruvange rwa gaze

Kuzunguruka ni ugukuraho ubuso butunganyirizwa (nka firime yicyuma, firime ya silicon oxyde, nibindi) kuri substrate nta masike yerekana amafoto, mugihe uzigama agace hamwe na masike yerekana amafoto, kugirango ubone ishusho isabwa hejuru yubutaka.

Uburyo bwo guswera burimo gushiramo imiti itose hamwe no gukama imiti yumye. Gazi ikoreshwa mumashanyarazi yumye yitwa gaz etching.

Gazi ya Etching mubisanzwe gaze ya fluor (halide), nkakarubone tetrafluoride, azote trifluoride, trifluoromethane, hexafluoroethane, perfluoropropane, nibindi.