Imyuka yihariyebitandukanye n'ibisanzweimyuka yo mu ngandakuko zifite akamaro kadasanzwe kandi zikoreshwa mu nzego runaka. Zifite ibisabwa byihariye ku isuku, ingano y'umwanda, imiterere, n'imiterere y'umubiri n'iya chimique. Ugereranyije n'imyuka yo mu nganda, imyuka yihariye iratandukanye cyane mu bwoko ariko ifite umusaruro muto n'ingano ntoya y'ibicuruzwa.

Itsindaimyuka ivanzenaimyuka isanzwe yo gupimaDukunze gukoresha ibice by'ingenzi by'imyuka yihariye. Imyuka ivanze ikunze kugabanywamo imyuka ivanze rusange n'imyuka ivanze y'ikoranabuhanga.

Imyuka ivanze muri rusange irimo:gaze ivanze na laser, gupima gazi ivanze, gusudira gazi ivanze, kubungabunga gazi ivanze, gazi ivanze ikomoka ku matara y'amashanyarazi, ubushakashatsi mu buvuzi no mu binyabuzima, gazi ivanze, kwica no gukingira gazi ivanze, gazi ivanze irimo umuvuduko mwinshi, gazi ivanze ifite umuvuduko mwinshi, n'umwuka udafite urwego.

Uruvange rw'imyuka ikoresheje ikoranabuhanga rurimo uruvange rw'imyuka ikoreshwa mu gupima ikirere, uruvange rw'imyuka ikoreshwa mu gupima ikirere, uruvange rw'imyuka ikoreshwa mu gupima ikirere, uruvange rw'imyuka ikoreshwa mu gupima ikirere, n'izindi myuka zikoreshwa mu gupima ikirere. Izi myuka zigira uruhare runini mu nganda za semiconductor na microelectronics kandi zikoreshwa cyane mu nganda nini zikoreshwa mu gupima ikirere (LSI) na VLSI (VLSI), ndetse no mu gukora ibikoresho bya semiconductor.

Ubwoko 5 bw'imyuka ivanze n'ikoranabuhanga ni bwo bukoreshwa cyane

Gukoresha imyuka ivanze mu gutera imiti igabanya ubukana

Mu gukora ibikoresho bya semiconductor na circuits zivanze, imyanda imwe n'imwe yinjizwa mu bikoresho bya semiconductor kugira ngo bitange ubwiyongere bw'imbaraga n'ubudahangarwa byifuzwa, bityo bigatuma habaho resistor, PN junctions, inkingi zitwikiriwe, n'ibindi bikoresho. Imyuka ikoreshwa muri gahunda yo gukoresha dopant yitwa dopant gaze. Iyi myuka ikubiyemo cyane cyane arsine, fosfini, fosfini trifluoride, fosfini pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, na diborane. Isoko ya dopant ikunze kuvangwa na gaze itwara ibintu (nka argon na azote) mu kabati k'isoko. Gaze ivanze ikomeza gushyirwa mu itanura rikwirakwira hanyuma ikazenguruka wafer, igashyira dopant ku buso bwa wafer. Dopant ihita ikorana na silicon kugira ngo ikore icyuma cya dopant cyimukira muri silicon.

Uruvange rw'imyuka ikura ya Epitaxial

Gukura kwa Epitaxial ni inzira yo gushyira no gukura ikintu kimwe cya kristu ku buso bw'ubutaka. Mu nganda za semiconductor, imyuka ikoreshwa mu gukura urwego rumwe cyangwa nyinshi z'ibikoresho hakoreshejwe uburyo bwa chemical vapor deposition (CVD) ku butaka bwatoranijwe neza yitwa epitaxial gaze. Imyuka isanzwe ya silicon epitaxial irimo dihydrogen dichlorosilane, silicon tetrachloride, na silane. Ikoreshwa cyane cyane mu gushyira epitaxial silicon deposition, polycrystalline silicon deposition, silicon oxide film deposition, silicon nitride film deposition, na amorphous silicon film deposition ku turemangingo tw'izuba n'ibindi bikoresho bishobora gufotora.

Imyuka yo guteramo iyoni

Mu nganda zikora ibikoresho bya semiconductor n'urusobe rw'amashanyarazi, imyuka ikoreshwa mu gutera iy'iyoni yose hamwe yitwa imyuka itera iy'iyoni. Imyanda yashyizwemo iy'iyoni (nka boron, fosifore, na arsenic) yihutishwa ikagera ku rwego rwo hejuru rw'ingufu mbere yo gushyirwa muri substrate. Ikoranabuhanga ryo gutera iy'iyoni rikoreshwa cyane mu kugenzura ingufu z'umuvuduko. Ingano y'imyanda yashyizwemo ishobora kumenyekana hapimwa umuvuduko w'amashanyarazi ya iyoni. Imyuka itera iy'iyoni isanzwe irimo fosifore, arsenic, na boron.

Gutwika gazi ivanze

Gucukura ni inzira yo gucukura ubuso bwatunganyijwe (nk'icyuma, silicon oxide, nibindi) ku gice kitapfundikiye na photoresist, mu gihe hagumana agace gapfundikiye na photoresist, kugira ngo haboneke ishusho ikenewe ku buso bwa substrate.

Uruvange rw'imyuka ivangwa n'imiti

Gushyira umwuka mu kirere (CVD) bikoresha ibintu bihindagurika kugira ngo bishyire ikintu kimwe cyangwa imvange binyuze mu buryo bw'umwuka mu gice cy'umwuka. Ubu ni uburyo bwo gukora filime bukoresha uburyo bw'umwuka mu gice cy'umwuka. Imyuka ya CVD ikoreshwa iratandukanye bitewe n'ubwoko bw'icyuma kirimo gukorwa.