Gazi ya laser

Gazi ya laser ikoreshwa cyane cyane mu gukurura no gushushanya gazi mu nganda z'ikoranabuhanga. Iyungukira mu guhanga udushya twa ecran za telefoni zigendanwa no kwaguka kw'ahantu hakoreshwa, ingano y'isoko rya polysilicone riciriritse rizarushaho kwaguka, kandi inzira yo gukurura gazi ya laser yazamuye cyane imikorere ya TFTs. Muri gaze za neon, fluorine, na argon zikoreshwa muri laser ya ArF excimer mu gukora semiconductors, neon igizwe na gaze ya laser irenga 96%. Hamwe no kunoza ikoranabuhanga rya semiconductor, ikoreshwa rya laser ya excimer ryariyongereye, kandi ishyirwaho ry'ikoranabuhanga ryo kwerekana inshuro ebyiri ryatumye ubwiyongere bukabije bw'ubukene bwa gaze ya neon ikoreshwa na laser ya ArF excimer. Iyungukira mu guteza imbere aho gaze zihariye z'ikoranabuhanga ziherereye, inganda zo mu gihugu zizagira umwanya mwiza wo gukura ku isoko mu gihe kizaza.

Imashini ya Lithography ni yo gikoresho cy'ingenzi mu nganda za semiconductor. Lithography igena ingano ya transistors. Iterambere rihuriweho ry'uruhererekane rw'inganda za lithography ni ingenzi ku iterambere ry'imashini ya lithography. Ibikoresho bya semiconductor bihuye nka photoresist, gaze photolithography, photomask, n'ibikoresho byo gusiga hamwe no gutunganya bifite ikoranabuhanga rihanitse. Gaze Lithography ni gaze imashini ya lithography ikora laser yijimye ya ultraviolet. Imyuka itandukanye ya lithography ishobora gutanga amasoko y'urumuri rw'uburebure butandukanye, kandi uburebure bwayo bugira ingaruka zitaziguye ku buryo imashini ya lithography ikora, ikaba ari imwe mu ngingo z'imashini ya lithography. Muri 2020, imashini za lithography zizaba zigurishwa ku isi yose 413, muri zo ASML zigurishwa 258 zari 62%, Canon zigurishwa 122 zari 30%, naho Nikon zigurishwa 33 zari 8%.