Choride ya hydrogenni gaze itagira ibara ifite impumuro nziza. Umuti wacyo wamazi witwa hydrochloric aside, izwi kandi nka hydrochloric aside. Hydrogene chloride irashonga cyane mumazi. Kuri 0 ° C, ingano 1 yamazi irashobora gushonga hafi 500 ya hydrogène chloride.

Ifite imiterere n'ibiranga bikurikira:

1. Isuku ryinshi

Ubuziranenge bwurwego rwa elegitoronikihydrogen chlorideni hejuru cyane, mubisanzwe kuri ppm cyangwa kurwego rwo hasi, kugirango barebe ko nta mwanda winjizwa mubikorwa byo gukora igice cya kabiri.

2. Kutagira imbaraga

Ni gaze ya inert ya chimique idakora hamwe nibindi bintu byinshi, bifite akamaro kanini mukurinda kwanduza ibikoresho bya semiconductor nibikoresho.

3. Umutekano muke

Icyiciro cya elegitoronikihydrogen chloridemuri rusange ifite chimie ihamye kugirango yizere gutunganya neza igice cya kabiri.

Mugutunganya igice cya kabiri, ibyingenzi byingenzi bya elegitoroniki ya hydrogène chloride harimo:

1. Gusukura hejuru no gutegura

Nka suku ikora neza, urwego rwa elegitoronikehydrogen chlorideikoreshwa mugukuraho okiside numwanda hejuru yubutaka kugirango harebwe ubuziranenge nubuziranenge bwurwego rwa epitaxial cyangwa firime.

2.Imfashanyo yo gukura idasanzwe

Ikoreshwa nkibikoresho byo kuvura hejuru mubikorwa bya epitaxial, ifasha kuzamura ubwiza bwurwego rwa epitaxial, kunoza guhuza latike, no kugabanya imiterere yinenge.

3. Kwiyerekana

Mbere yo gutegura ibikoresho bya semiconductor, icyiciro cya elegitoronikihydrogen chlorideIrashobora gukoreshwa mugutunganya ubuso bwubutaka kugirango habeho urufatiro ruhamye rwo kunoza imiterere hagati ya epitaxial layer na substrate.

4. Umukozi wo kubitsa

Mubikorwa byo guta imyuka ya chimique (CVD) cyangwa kubitsa imyuka yumubiri (PVD), hydrogène chloride yo mu rwego rwa elegitoronike irashobora gukoreshwa nkigikoresho cyo kohereza gaze kugirango igire uruhare mu guta ibikoresho bya semiconductor.

5. Umukozi wohereza gaz-icyiciro

Nkumukozi wohereza gazi-fase, abandi bambere ba gaze binjizwa mubyumba byabigenewe kugirango bafashe guhindura igipimo cyo kubitsa hamwe nuburinganire bwibintu.

Ibi biranga gukora urwego rwa elegitoronikihydrogen chlorideumukozi wingenzi utunganya tekinoroji ya semiconductor, ifite ingaruka zingenzi kumikorere no kwizerwa kubikoresho byanyuma.

Usibye kuba ikoreshwa mugutunganya semiconductor, hydrogène yo mu rwego rwa elegitoronike irashobora kubona imikoreshereze itandukanye mu tundi turere, harimo: Gutegura ibikoresho byera cyane, Utugingo ngengabuzima, imikurire y’ibikoresho bya Semiconductor, Vapor Phase Lithography, Isesengura ryibikoresho, Ubushakashatsi bw’imiti.

Muri rusange, icyiciro cya elegitoronikihydrogen chlorideni gazi itandukanye, isukuye cyane ifite ibyiciro byinshi byo gusaba hanze yinganda zikora.