Hydrogen chlorideni umwuka utagira ibara ufite impumuro ikaze. Umuti wayo w'amazi witwa aside hydrochloric, uzwi kandi nka aside hydrochloric. Hydrogen chloride irashongera cyane mu mazi. Ku bushyuhe bwa 0°C, ingano 1 y'amazi ishobora gushonga ingano zigera kuri 500 za hydrogen chloride.

Ifite imiterere n'ibiranga bikurikira:

1. Ubuziranenge bwinshi

Ubuziranenge bw'urwego rw'ikoranabuhangahydrogène chlorideiri hejuru cyane, akenshi kuri ppm cyangwa ku rwego rwo hasi, kugira ngo hatagira imyanda yinjizwa mu gikorwa cyo gukora semiconductor.

2. Ubudakora neza

Ni umwuka udakora neza mu buryo bwa shimi udahura n'ibindi bintu byinshi, ibyo bikaba ari ingenzi cyane mu kwirinda kwanduza ibikoresho n'ibikoresho bya semiconductor.

3. Gutuza cyane

Icyiciro cy'ikoranabuhangahydrogène chloridemuri rusange ifite shimi ihamye kugira ngo ikoreshwe neza mu gutunganya semiconductor.

Mu gutunganya semiconductor, ikoreshwa ry'ingenzi rya hydrogen chloride yo mu rwego rwa elegitoroniki ririmo:

1. Gusukura no gutegura ubuso

Nk'isukura neza ku buso, ikoranabuhanga rigezwehohydrogène chlorideikoreshwa mu gukuraho ogisijeni n'imyanda ku buso bwa substrate kugira ngo harebwe ubwiza n'ubuziranenge bw'urwego rwa epitaxial cyangwa firime.

2. Inkunga yo gukura mu gice cya Epitaxial

Ikoreshwa nk'umuti wo kuvura ubuso mu gikorwa cyo gupima epitaxial, ifasha kunoza ubwiza bw'urwego rwa epitaxial, kunoza guhuza urukuta, no kugabanya ikorwa ry'ubusembwa bw'urukuta.

3. Gutegura mbere yo gukoresha substrate

Mbere yo gutegura ibikoresho bya semiconductor, ikoranabuhanga rigezwehohydrogène chlorideishobora gukoreshwa mu gutunganya ubuso bw'ubutaka kugira ngo bube ishingiro rihamye kugira ngo inoze uburyo bwo gufatana hagati y'urwego rwa epitaxial n'ubutaka.

4. Umukozi wungirije ushinzwe gutanga

Mu gikorwa cyo gushyira umwuka mu buryo bwa chemical (CVD) cyangwa gushyira umwuka mu buryo bwa physical (PVD), hydrogen chloride yo mu rwego rwa elegitoroniki ishobora gukoreshwa nk'uburyo bwo kohereza umwuka mu rwego rwa gaze kugira ngo igire uruhare mu gushyira umwuka mu buryo bwa semiconductor.

5. Umukozi wo kohereza lisansi mu cyiciro cya gazi

Nk'igikoresho cyo kohereza umwuka mu buryo bwa gaze, izindi mashini zibanza zishyirwa mu cyumba cy'ibisubizo kugira ngo zifashe mu guhindura umuvuduko w'ibicuruzwa n'uburyo ibintu bingana.

Ibi biranga bituma habaho ikoranabuhangahydrogène chlorideigikoresho cy'ingenzi mu gutunganya ibikoresho mu ikoranabuhanga rya semiconductor, bigira ingaruka zikomeye ku mikorere n'ubwizerwe bw'igikoresho cya nyuma.

Uretse ikoreshwa ryayo mu gutunganya ibikoresho bya semiconductor, hydrogen chloride yo mu rwego rwa elegitoroniki ishobora gukoresha mu bindi bice bitandukanye, harimo: Gutegura ibikoresho bifite isuku nyinshi, Utunyangingo twa lisansi, Gukura kw'ibikoresho bya semiconductor, Gusesengura ibikoresho bya Vapor Phase, Gusesengura ibikoresho, Ubushakashatsi ku bya shimi.

Muri rusange, amanota y'ikoranabuhangahydrogène chlorideni gaze ikoreshwa mu buryo butandukanye kandi isukuye cyane, ifite uburyo bwinshi bwo kuyikoresha hanze y’inganda zikora ibikoresho bya semiconductor.