Hydrogen chlorideni gaze itagira ibara hamwe na odor. Igisubizo cyacyo cyibitangaje cyitwa Acide ya Hydrochloric, uzwi kandi nka aside hydrochloric. Hydrogen chloride irashonje cyane mumazi. Kuri 0 ° C, ingano 1 y'amazi irashobora gushonga imibumbe igera kuri 500 ya chlorage.

Ifite ibintu bikurikira hamwe nibiranga:

1. Isuku yo hejuru

Ubuziranenge bw'amanota ya elegitoronikihydrogen chlorideni hejuru cyane, mubisanzwe kuri ppm cyangwa kurwego rwo hasi, kugirango tumenye ko ntamwanda bitangizwa mubikorwa bya semiconductor.

2. Induru

Ni gaze ya inert idakira nibindi bintu byinshi, bikaba ari ngombwa cyane kwirinda kwanduza ibikoresho nibikoresho bya semiconductor nibikoresho.

3. Guhagarara cyane

Amanota ya elegitoronikihydrogen chlorideMubisanzwe bifite chimie ihamye kugirango yemeze semiconductor yizewe.

Mu gutunganya Semiconductor, porogaramu nyamukuru ya elegitoronike ya hydrognan chloride irimo:

1. Gusukura hejuru no kwitegura

Nkubutaka bukora neza, amanota ya elegitoronikihydrogen chlorideikoreshwa kugirango ikureho oxide numwanda kuva hejuru kugirango umenye neza ubuziranenge nubuziranenge bwikigereranyo cyangwa firime.

2.Intangiriro yo gukura

Ikoreshwa nkumukozi wo kuvura hejuru muburyo bwo kwandika, bifasha kuzamura ireme ryibice byo hejuru, binoza lattice bihuye, no kugabanya ishinga ryinzego za lattice.

3. Shyira ahagaragara

Mbere yo gutegura ibikoresho bya semiconductor, amanota ya elegitoronikihydrogen chlorideIrashobora gukoreshwa mugufata ubuso bwa substrate kugirango ukore ishingiro rihamye kugirango utezimbere amarangamutima hagati yikigero cya eptaxial hamwe na substrate.

4. Umukozi ufasha

Muburyo bwo kubitsa imiti (CVD) cyangwa imyuka iryamye (PVD), imitwe ya elegitoronike chloride irashobora gukoreshwa nkicyiciro cya kabiri cyo kohereza ibikoresho byo kubitsa.

5. Umukozi witegura

Nka shitingi ya PASE-PHAYE, abandi bashinje imiyoboro ya gaze bamenyerejwe mucyumba c'uko reaction kugirango bafashe guhindura igipimo cyo kubitsa no guhuriza hamwe ibikoresho.

Ibiranga gukora amanota ya elegitoronikihydrogen chlorideUmukozi wingenzi wo gutunganya mukoranabuhanga rya semiconductor, rifite ingaruka zikomeye kumikorere no kwizerwa kubikoresho byanyuma.

Usibye gukoreshwa mu gutunganya semiconductor, hashobora kubona imirongo y'amazi ya hydrognan irashobora kubona ikoreshwa zitandukanye mu tundi turere, harimo no gutegura imikurire yo gukumira, imikurire y'imiterere, impyisi yicyicaro, ubushakashatsi bwimiti.

Muri rusange, amanota ya elegitoronikihydrogen chlorideni gaze itandukanye, isukuye isukuye ifite amanota menshi hanze yinganda ya semiconductor.