Ingano nini ya gaze yihariye ya elegitoroniki - Azote Trifluoride NF3

Inganda za semiconductor n'inganda za panel mu gihugu cyacu zikomeje kugira iterambere rikomeye. Azote trifluoride, nk'umwuka w'ikoranabuhanga udasanzwe kandi munini mu gukora no gutunganya panel na semiconductors, ifite isoko rinini.

Imyuka yihariye ikoreshwa cyane irimo fluorine irimohexafluoride ya sulfur (SF6), tungsten hexafluoride (WF6),tetrafluoride karuboni (CF4), trifluoromethane (CHF3), azote trifluoride (NF3), hexafluoroethane (C2F6) na octafluoropropane (C3F8). Azote trifluoride (NF3) ikoreshwa cyane cyane nk'isoko ya fluorine kuri hydrogen fluoride-fluoride gaze ifite ingufu nyinshi. Igice cy'ingenzi (hafi 25%) cy'ingufu zikoreshwa hagati ya H2-O2 na F2 gishobora kurekurwa n'imirasire ya laser, bityo HF-OF lasers nizo lasers zitanga icyizere cyane muri lasers za chemical.

Azote trifluoride ni umwuka mwiza cyane wo gusya plasma mu nganda zikora ibikoresho bya elegitoroniki. Ku bijyanye no gusya silicon na silicon nitride, azote trifluoride ifite igipimo cyo gusya no guhitamo kurusha tetrafluoride ya karuboni hamwe n'uruvange rwa tetrafluoride ya karuboni na ogisijeni, kandi nta mwanda igira ku buso. Cyane cyane mu gusya ibikoresho bya elegitoroniki bifite ubugari buri munsi ya 1.5um, azote trifluoride ifite igipimo cyiza cyane cyo gusya no guhitamo, nta bisigazwa bisigara ku buso bw'ikintu cyashushanyijwe, kandi ni n'umuti mwiza cyane wo gusukura. Hamwe n'iterambere rya nanotechnology n'iterambere rinini ry'inganda zikora ibikoresho by'ikoranabuhanga, icyifuzo cyayo kiziyongera umunsi ku wundi.

Nk'ubwoko bwa gaze yihariye irimo fluorine, azote trifluoride (NF3) ni yo gaze yihariye ya elegitoroniki nini ku isoko. Idafite ubushyuhe bwinshi mu cyumba, ikora cyane kurusha ogisijeni, irahamye kurusha fluorine, kandi yoroshye kuyifata iyo ubushyuhe buri hejuru.

Azote trifluoride ikoreshwa cyane cyane nk'imyuka ikuraho plasma n'ibikoresho byo gusukura icyumba cy'ibiza, ikwiriye mu nganda zikora nk'udupira twa semiconductor, displays za flat panel, fibre optique, uturemangingo twa photovoltaic, nibindi.

Ugereranyije n'izindi gaze za elegitoroniki zirimo fluorine, azote trifluoride ifite ibyiza byo gukora vuba no gukora neza cyane, cyane cyane mu gukata ibikoresho birimo silicon nka silicon nitride, ifite umuvuduko wo gukata no guhitamo neza, nta bisigazwa bisiga ku buso bw'ikintu cyashushanyijwe, kandi ni isuku nziza cyane, kandi ntihumanya ubuso kandi ishobora guhaza ibyifuzo by'uburyo bwo gutunganya.