Umubare munini wa elegitoroniki idasanzwe - Azote Trifluoride NF3

Inganda ziciriritse zigihugu cyacu ninganda zikora ibintu bikomeza urwego rwo hejuru rwiterambere. Azote trifluoride, nkingirakamaro kandi nini nini ya gaze idasanzwe ya elegitoronike mu gukora no gutunganya panne na semiconductor, ifite umwanya munini w isoko.

Bikunze gukoreshwa fluor irimo imyuka ya elegitoroniki idasanzwe irimosulfur hexafluoride (SF6), tungsten hexafluoride (WF6),karubone tetrafluoride (CF4), trifluoromethane (CHF3), azote trifluoride (NF3), hexafluoroethane (C2F6) na octafluoropropane (C3F8). Azote trifluoride (NF3) ikoreshwa cyane nkisoko ya fluor ya hydrogène fluoride-fluoride gazi yingufu zikoreshwa cyane. Igice cyingirakamaro (hafi 25%) yingufu zogukora hagati ya H2-O2 na F2 zirashobora kurekurwa nimirasire ya laser, bityo lazeri ya HF-OF niyo laseri itanga ikizere cyane mumashanyarazi.

Azote trifluoride ni gaze nziza ya plasma ikora inganda munganda ziciriritse. Kuri nitride ya silicon na silicon, trifluoride ya azote ifite igipimo cyinshi cyo guhitamo no guhitamo kurusha tetrafluoride ya karubone hamwe nuruvange rwa karubone tetrafluoride na ogisijeni, kandi nta mwanda uhari hejuru. Cyane cyane mugukata ibikoresho byumuzunguruko byahujwe hamwe nubunini buri munsi ya 1.5um, trifluoride ya azote ifite igipimo cyiza cyane cyo guhitamo no guhitamo, ntigisigara gisigara hejuru yikintu cyashizweho, kandi nikintu cyiza cyane cyo gukora isuku. Hamwe niterambere rya nanotehnologiya hamwe niterambere rinini ryinganda za elegitoroniki, ibyifuzo byayo biziyongera umunsi kumunsi.

Nkubwoko bwa florine irimo gaze idasanzwe, azote trifluoride (NF3) nigicuruzwa kinini cya elegitoroniki kidasanzwe ku isoko. Ifite imiti yubushyuhe bwicyumba, ikora cyane kuruta ogisijeni, ihagaze neza kuruta fluor, kandi byoroshye kuyikoresha mubushyuhe bwinshi.

Azote trifluoride ikoreshwa cyane cyane nka plasma etching ya gaz hamwe nogukora ibyumba byogusukura ibyumba, bikwiranye nimirima ikora nka chipi ya semiconductor, icyerekezo kibase, fibre optique, selile fotovoltaque, nibindi.

Ugereranije n’ibindi bikoresho bya elegitoroniki birimo florine, azote trifluoride ifite ibyiza byo kwitwara byihuse no gukora neza cyane, cyane cyane mugutobora ibikoresho birimo silikoni nka nitride ya silicon, ifite igipimo cyinshi cyo guhitamo no guhitamo, ntigisigara gisigara hejuru yikintu cyashizwemo, kandi nacyo ntigishobora kwanduza ibintu kandi gishobora gutunganya ibintu bikenewe.