Umubare munini wa gaze idasanzwe - azote trifluoride nf3

Inganda za semiconductor yigihugu hamwe ninganda zitsinda zikomeza iterambere ryiterambere. Azote trifluoride, nka gaze yingenzi kandi nini-nini idasanzwe muri elegitoroniki mubyakozwe no gutunganya imbaho ​​na semicondu imibare, ifite umwanya mugari w'isoko.

Mubisanzwe byakoreshejwe-birimo imyuka idasanzwe ya elegitoroniki irimosulfur hexafluoride (sf6), Tungsten Hexafluoride (WF6),Carbone Tetrafluoride (CF4), Trifluoromethane (Chf3), ACROPLUORIdeIde (NF3), Hexafluoroethane (C2F6) na Ukwakira (C3F8). Azote trifluoride (nf3) ikoreshwa cyane nka fluorine isoko ya hydroogen fluoride-fluoride gazi yingufu nyinshi. Igice cyiza (hafi 25%) cyingufu zijyanye na H2-O2 na F2 zirashobora kurekurwa nimirasire ya laser, bityo HF-lases nizo basezeranye cyane mumahanga.

Azote trifluoride ninde nziza ya plasma yincamake murwego rwa microelekronics. Kuri etching silicon na silicon nitride, azote trifluoride igipimo cyo hejuru no guhitamo kuruta karubone tetrafluide na ogisijeni, kandi nta gihuru cyanduye. Cyane cyane mumashyamba yibikoresho byumuzunguruko bifite ubunini butarenze 1.5um Hamwe n'iterambere rya NanoteCology hamwe niterambere rinini ryinganda za elegitoroniki, icyifuzo cyayo kizongera umunsi kumunsi.

Nkubwoko bwa fluorine-burimo gaze idasanzwe, azote trifluoride (nf3) nigicuruzwa kinini cya gazi cyihariye cya elegict kumasoko. Ni inert ifite ubushyuhe bwicyumba, birakora kuruta ogisijeni, gihamye kuruta fluorine, kandi byoroshye gukemura ku bushyuhe bwinshi.

Azote trifluoride ikoreshwa cyane cyane nkibisobanuro bya plasma hamwe nimpande zububiko, bikwiranye na semicnductor ya semiconductor, umwanya mwiza, umwanya wa optique, etcovotaic selile, nibindi.

Ugereranije nandi kazu ka elegine, urimo Tripluoride yo Kwihuta no gukora neza, kandi ni umukozi mwiza wa silicon, kandi ni umukozi mwiza wa silicon, kandi ntabwo ari umukozi mwiza wa Silicon, kandi ntabwo ari umukozi mwiza, kandi ntabwo ari umukozi mwiza, kandi ntabwo ari umukozi mwiza, kandi ntabwo ari umukozi mwiza, kandi ntabwo ari umukozi mwiza kandi ushobora kuzuza ibikenewe bya gutunganya.