Gaze yakoreshejwe cyane ya elegitoronike - azote trifluoride

Kuvura ibintu bisanzwe birimo imyuka idasanzwe ya elegitoroniki harimosulfur hexafluoride (sf6), Tungsten Hexafluoride (WF6),Carbone Tetrafluoride (CF4), Trifluoromethane (Chf3), ACROPLUORIdeIde (NF3), Hexafluoroethane (C2F6) na Ukwakira (C3F8).

Hamwe n'iterambere rya NanoteCology hamwe niterambere rinini ryinganda za elegitoroniki, icyifuzo cyayo kizongera umunsi kumunsi. Azote trifluoride, nka gaze yingirakamaro kandi nini ikoreshwa muburyo budasanzwe bwa elegitoroniki mugukora no gutunganya panel na semicondu imibare, bifite umwanya munini wamasoko.

Nkubwoko bwa fluorine-irimo gaze idasanzwe,azote trifluoride (nf3)nigicuruzwa cyihariye cya elegitoroniki gifite ubushobozi bunini bwisoko. Ni inert mu bushyuhe bwicyumba, birakora kuruta ogisijeni ku bushyuhe bwinshi, gihamye kuruta fluorine, kandi byoroshye kubyitwaramo. Azote trifluoride ikoreshwa cyane nka gaze ya plasma hamwe nigikorwa cyo gusukura Urugereko, kandi bikwiranye nububiko bwimikorere ya semiconductor ya chice, akabaho keza yerekana, fineri nziza, etcovotaic selile, nibindi.

Ugereranije nandi mavuriro-irimo imyuka ya elegitoroniki,azote trifluorideifite ibyiza byo kubyitwaramo byihuse no gukora neza. Cyane cyane mu kugashyiraho ibikoresho birimo silicon nka Silicon Nitride, ifite igipimo kinini cyo kugamagana no guhitamo, nta gusiba hejuru yikintu cyanditseho. Numukozi mwiza cyane kandi udafite umwanda hejuru, ushobora kuzuza ibikenewe byo gutunganya.