Uruhare rwa sulfur hexafluoride muri silicon nitride etching

Sulfur Hexafluoride ni gaze ifite imitungo igaragara kandi ikoreshwa cyane muri arct arc izihira kandi ihinduka, ibishushanyo mbonera, esc. Icyiciro cya elegitoroniki hejuru-isuku HexfUoride ni elegitoronike nziza electronic elegitoroniki, ikoreshwa cyane murwego rwa tekinoroji ya microelecronics. Uyu munsi, Nii Ruide Umwirondoro Wihariye wa Gaz Yueyue azashyiraho porogaramu ya sulfur hexafluoride muri silicon nitride na station yibipimo bitandukanye.

Turaganira kuri SF6 Plasma Etching gahunda ya Sinex, harimo guhindura imbaraga za plasma, igipimo cya gaze cya SF6 / we nongeraho imirasire ya TFT, kandi yongeraho imirasire ya TFT, kandi yongeraho imirasire ya TFT, kandi yongeraho imirasire ya TFT, kandi yongeraho imirasire ya TFT, kandi yongeraho imirasire ya TFT, no gukoresha imirasire ya COLD, kandi akoresheje imirasire ya TFT, no gukoresha imirasire ya TFT, kandi aganira ku ruhare rwa TFT, kandi akoresheje imirasire ya TFT Igipimo cyo gutandukana, kandi gishakisha isano iri hagati yo guhindura urugero rwa ferx esching igipimo hamwe nibikoresho bya plasma.

Ubushakashatsi bwabonye ko igihe imbaraga za plasma ariyongereye, igipimo cyo kugamwoga kiriyongera; Niba igipimo cyuruzi cya SF6 muri plasma cyiyongereye, kwibanda kuri Atom kwiyongera kandi bifitanye isano neza nibipimo bya ETCHIG. Byongeye kandi, nyuma yo kongeramo gaze ya catic o2 munsi yikigereranyo cyagenwe, ariko hazabaho ingaruka zongera gutandukana na sf6: . Ariko icyarimwe, atome muri plasma nayo iragenda kandi yoroshye gukora siox cyangwa sinxo (YX) hamwe na atome iri hejuru, kandi byinshi byo kwiyongera, atome igoye kubitwara. Kubwibyo, igipimo cya ETCHING gitangira kutinda mugihe o2 / sf6 igipimo cyegereye 1. (3) mugihe o2 / sf6 igipimo kirenze 1, igipimo cya etching kigabanuka. Kubera ubwiyongere bwinshi muri O2, atome ya fe yatandukanijwe hamwe na O2 nuburyo bwa, bigabanya kwibanda kuri atome ya f, bikaviramo kugabanuka kubipimo bya ETCHIG. Birashobora kugaragara nkibi mugihe O2 yongeyeho, igipimo cyimbuto cya O2 / SF6 kiri hagati ya 0.2 na 0.8, hamwe nigipimo cyiza cyo kutiruka gishobora kuboneka.