Ibyuma bya elegitoronikiimyuka idasanzweni ishami ryingenzi rya gaze zidasanzwe. Zinjira hafi ya zose zihuza umusaruro wa semiconductor kandi ni ibikoresho byibanze byingirakamaro mu gukora inganda za elegitoronike nka ultra-nini nini nini ihuza imiyoboro, ibikoresho byerekana ibyerekezo, hamwe n’izuba.

Muri tekinoroji ya semiconductor, imyuka irimo fluor ikoreshwa cyane. Kugeza ubu, ku isoko rya gazi ya elegitoroniki ku isi, imyuka ya elegitoroniki irimo florine igera kuri 30% byuzuye. Fluorine irimo imyuka ya elegitoronike nikintu cyingenzi cyimyuka yihariye ya elegitoronike mubikoresho byikoranabuhanga. Zikoreshwa cyane nkibikoresho byogusukura nogukora ibikoresho, kandi birashobora no gukoreshwa nka dopants, ibikoresho byo gukora firime, nibindi. Muri iki kiganiro, umwanditsi azagutwara kugirango usobanukirwe na gaze isanzwe irimo florine.

Ibikurikira bikunze gukoreshwa na gaze irimo fluor

Azote trifluoride (NF3): Gazi ikoreshwa mugusukura no kuvanaho ububiko, ubusanzwe ikoreshwa mugusukura ibyumba byitwara hamwe nubuso bwibikoresho.

Hexafluoride ya sulfure (SF6).

Hydrogen fluoride (HF): Ikoreshwa mugukuraho okiside hejuru ya silicon kandi nkibisumizi byo gushiramo silicon nibindi bikoresho.

Fluoride ya azote (NF): Ikoreshwa mubikoresho bya etch nka silicon nitride (SiN) na nitride ya aluminium (AlN).

Trifluoromethane (CHF3) natetrafluoromethane (CF4): Byakoreshejwe mugukora ibikoresho bya fluor nka silicon fluoride na fluor ya aluminium.

Nyamara, imyuka irimo fluor ifite ibyago bimwe na bimwe, birimo uburozi, kwangirika, no gutwikwa.

Uburozi

Imyuka imwe n'imwe irimo fluor ni uburozi, nka hydrogène fluoride (HF), imyuka yayo irakaza cyane uruhu n'inzira z'ubuhumekero kandi byangiza ubuzima bw'abantu.

Ruswa

Hydrogene fluoride na fluoride zimwe na zimwe zirashobora kwangirika cyane kandi birashobora kwangiza cyane uruhu, amaso hamwe nubuhumekero.

Umuriro

Floride zimwe zirashya kandi zigakora na ogisijeni cyangwa amazi mu kirere kugirango zirekure ubushyuhe bwinshi na gaze z'ubumara, zishobora gutera umuriro cyangwa guturika.

Umuvuduko ukabije

Imyuka imwe ya fluor iraturika munsi yumuvuduko mwinshi kandi bisaba ubwitonzi budasanzwe iyo ikoreshejwe kandi ibitswe.

Ingaruka ku bidukikije

Imyuka irimo florine ifite ubuzima bwo mu kirere hamwe n’agaciro ka GWP, bigira ingaruka mbi ku gipimo cya ozone yo mu kirere kandi gishobora gutera ubushyuhe bw’isi ndetse n’umwanda w’ibidukikije.

Ikoreshwa rya gaze mubice bigenda bigaragara nka elegitoroniki ikomeje kwiyongera, izana umubare munini w'ibyifuzo bya gaze mu nganda. Hashingiwe ku bwinshi bw’ubushobozi bushya bwo gukora ibikoresho byingenzi bya elegitoronike nka semiconductor hamwe n’ibikoresho byerekana mu gihugu cy’Ubushinwa mu myaka mike iri imbere, ndetse n’icyifuzo gikomeye cyo gusimbuza ibicuruzwa biva mu mahanga ibikoresho by’imiti ya elegitoroniki, inganda za gaze mu gihugu zizatangira umuvuduko wo hejuru.