ikoranabuhangaimyuka yihariyeni ishami ry'ingenzi ry'imyuka yihariye. Yinjira hafi ya yose mu musaruro wa semiconductor kandi ni ibikoresho fatizo by'ingenzi mu gukora inganda z'ikoranabuhanga nka ultra-large-scale integrated circuits, flat panel display devices, na solar cells.

Mu ikoranabuhanga rya semiconductor, imyuka irimo fluorine ikoreshwa cyane. Muri iki gihe, ku isoko mpuzamahanga rya gaze y'ikoranabuhanga, imyuka irimo fluorine ingana na 30% by'ibiteranyo byose. Imyuka irimo fluorine ni igice cy'ingenzi cya gaze zidasanzwe z'ikoranabuhanga mu bijyanye n'amakuru y'ikoranabuhanga. Ikoreshwa cyane cyane nk'ibikoresho byo gusukura no gushushanya, kandi ishobora no gukoreshwa nk'ibikoresho byo gushushanya, ibikoresho byo gukora filime, nibindi. Muri iyi nkuru, umwanditsi azagufasha gusobanukirwa imyuka isanzwe irimo fluorine.

Ibi bikurikira ni imyuka ikoreshwa cyane irimo fluorine

Azote trifluoride (NF3): Gazi ikoreshwa mu gusukura no gukuraho imyanda, ubusanzwe ikoreshwa mu gusukura ibyumba by'ibinyabutabire n'ibikoresho.

Hexafluoride ya sulfure (SF6): Ni igikoresho gitera fluorinating gikoreshwa mu gutunganya okiside no mu gukingira umwuka mu kuzuza ibyuma bikingira.

Hydrogen fluoride (HF): Ikoreshwa mu gukuraho okiside ku buso bwa silicon no nk'ikintu cyo gushushanya silicon n'ibindi bikoresho.

Azote fluoride (NF): Ikoreshwa mu gukata ibikoresho nka silicon nitride (SiN) na aluminium nitride (AlN).

Trifluoromethane (CHF3) natetrafluoromethane (CF4): Ikoreshwa mu gukata ibikoresho bya fluoride nka silicon fluoride na aluminium fluoride.

Ariko, imyuka irimo fluorine ifite ibyago bimwe na bimwe, birimo uburozi, kwangirika no gushya.

Uburozi

Imyuka imwe irimo fluorine ni uburozi, nka hydrogen fluoride (HF), umwuka wayo utera cyane uruhu n'inzira z'ubuhumekero kandi ukangiza ubuzima bw'abantu.

Kwangirika

Ifurude ya hydrogène na fluoride zimwe na zimwe zirangiza cyane kandi zishobora kwangiza cyane uruhu, amaso n'inzira z'ubuhumekero.

Ubushyuhe

Hari fluoride zimwe na zimwe zishobora gushya kandi zigakorana na ogisijeni cyangwa amazi mu kirere kugira ngo zirekure ubushyuhe bwinshi n'imyuka y'uburozi, ishobora gutera inkongi cyangwa guturika.

Ingaruka z'umuvuduko ukabije

Imyuka imwe irimo fluorine iraturika iyo ikoreshejwe kandi ikabikwa, bityo ikaba ikeneye kwitabwaho cyane.

Ingaruka ku bidukikije

Imyuka irimo fluorine igira ubuzima bwo mu kirere bwinshi kandi ifite agaciro ka GWP, bigira ingaruka mbi ku rukuta rwa ozone rwo mu kirere kandi bishobora gutera ubushyuhe bw'isi n'ihumana ry'ibidukikije.

Ikoreshwa ry'imyuka mu nzego zigitangira gukora nk'ibikoresho by'ikoranabuhanga rikomeje kwiyongera, binatuma habaho ubwinshi bw'ingufu nshya mu nganda. Hashingiwe ku bushobozi bwinshi bw'umusaruro mushya w'ibice by'ingenzi by'ikoranabuhanga nka semiconductors na panels zo kwerekana mu Bushinwa mu myaka mike iri imbere, ndetse no gukenera gukomeye gusimbuza ibikoresho by'ikoranabuhanga bya elegitoroniki, inganda z'amashanyarazi zo mu gihugu imbere zizazana umuvuduko wo kwiyongera.