Ni ubuhe bwoko bukunze gukoreshwa mu myuka yumye?

Ikoranabuhanga ryumye ni kimwe mubikorwa byingenzi. Gazi yumye yumye nikintu cyingenzi mubikorwa bya semiconductor hamwe nisoko yingenzi ya gaz ya plasma. Imikorere yacyo igira ingaruka itaziguye ubuziranenge n'imikorere y'ibicuruzwa byanyuma. Iyi ngingo isangira cyane cyane imyuka ikoreshwa cyane mugikorwa cyo gukama cyumye.

Imyuka ishingiye kuri fluor: nkakarubone tetrafluoride (CF4), hexafluoroethane (C2F6), trifluoromethane (CHF3) na perfluoropropane (C3F8). Iyi myuka irashobora kubyara fluoride ihindagurika mugihe itoboye silicon na silicon, bityo bikageraho.

Imyuka ya Chlorine: nka chlorine (Cl2),boron trichloride (BCl3)na silicon tetrachloride (SiCl4). Imyuka ya Chlorine irashobora gutanga ioni ya chloride mugihe cyo guterana, ifasha kuzamura igipimo cyo guhitamo no guhitamo.

Imyuka ya Bromine: nka bromine (Br2) na iyode ya bromine (IBr). Imyuka ya Bromine irashobora gutanga imikorere myiza yo gutobora muburyo bumwe na bumwe bwo guswera, cyane cyane iyo itereye ibikoresho bikomeye nka karubide ya silicon.

Imyuka ya azote na gaze ya ogisijeni: nka azote trifluoride (NF3) na ogisijeni (O2). Iyi myuka isanzwe ikoreshwa muguhindura imiterere yimyitwarire mugikorwa cyo guterana kugirango tunonosore guhitamo hamwe nicyerekezo cya etching.

Iyi myuka igera ku buso bwuzuye bwibintu hifashishijwe uburyo bwo gusohora umubiri hamwe nubushakashatsi bwimiti mugihe cyo gutera plasma. Guhitamo gazi yo guterwa biterwa nubwoko bwibikoresho bigomba guterwa, ibisabwa byo guhitamo ibyokurya, nigipimo cyifuzwa.