Ni iyihe myuka ikoreshwa cyane mu gukata ibyuma byumye?

Ikoranabuhanga ryo gukata icyuma cyumye ni imwe mu nzira z'ingenzi. Gazi yo gukata icyuma cyumye ni ingenzi mu nganda za semiconductor kandi ni isoko y'ingenzi ya gaze yo gukata icyuma cyumye. Imikorere yayo igira ingaruka zitaziguye ku bwiza n'imikorere y'umusaruro wa nyuma. Iyi nkuru ikubiyemo ahanini imyuka ikunze gukoreshwa mu gukata icyuma cyumye.

Imyuka ishingiye kuri fluorine: nkatetrafluoride karuboni (CF4), hexafluoroethane (C2F6), trifluoromethane (CHF3) na perfluoropropane (C3F8). Iyi myuka ishobora gukora neza fluoride ihindagurika iyo icukura silicon na silicon, bityo ikavanaho ibikoresho.

Imyuka ishingiye kuri chlorine: nka chlorine (Cl2),boron trichloride (BCl3)na silicon tetrachloride (SiCl4). Imyuka ishingiye kuri chlorine ishobora gutanga iyoni za chloride mu gihe cyo gukata, ibi bifasha kunoza umuvuduko wo gukata no guhitamo.

Imyuka ishingiye kuri bromine: nka bromine (Br2) na iyode ya bromine (IBr). Imyuka ishingiye kuri bromine ishobora gutanga imikorere myiza yo gukata mu buryo bumwe na bumwe bwo gukata, cyane cyane iyo gukata ibikoresho bikomeye nka silicon carbide.

Imyuka ishingiye kuri azote n'ishingiye kuri ogisijeni: nka azote trifluoride (NF3) na ogisijeni (O2). Iyi myuka ikoreshwa mu guhindura imiterere y'imikorere mu gikorwa cyo gukata kugira ngo inoze uburyo bwo guhitamo no kwerekeza icyerekezo cy'ikata.

Iyi myuka igera ku gukata neza ubuso bw'ibintu binyuze mu guhuza uburyo bwo gukata no gukora imiti mu gihe cyo gukata mu maraso. Guhitamo gazi yo gukata biterwa n'ubwoko bw'ibikoresho bigomba gukata, ibisabwa mu guhitamo icyuma, n'umuvuduko wifuzwa wo gukata.