Carbone Tetrafluoride (CF4)

Ibipimo bya tekiniki

Carbone tetrafluoride ni hydrocarubone ya halogene hamwe na chimique CF4. Irashobora gufatwa nka hydrocarubone ya halogene, metani ya halogene, parfluorocarubone, cyangwa nkikintu kidasanzwe. Carbone tetrafluoride ni gaze itagira ibara kandi idafite impumuro nziza, idashobora gushonga mumazi, gushonga muri benzene na chloroform. Ihamye munsi yubushyuhe busanzwe nigitutu, irinde okiside ikomeye, ibintu byaka cyangwa byaka. Gazi idashobora gukongoka, umuvuduko wimbere wa kontineri uziyongera mugihe uhuye nubushyuhe bwinshi, kandi harikibazo cyo guturika no guturika. Ifite imiti ihamye kandi ntishobora gutwikwa. Gusa amazi ya ammonia-sodium reagent arashobora gukora mubushyuhe bwicyumba. Carbone tetrafluoride ni gaze itera ingaruka za parike. Irahagaze neza, irashobora kuguma mu kirere igihe kirekire, kandi ni gaze ya parike ikomeye cyane. Carbone tetrafluoride ikoreshwa mugikorwa cya plasma yo gutembera kwinzira zitandukanye. Ikoreshwa kandi nka gaze ya lazeri, kandi ikoreshwa muri firigo ikonjesha ubushyuhe buke, ibishishwa, amavuta yo kwisiga, ibikoresho bikingira, hamwe na coolant kubushakashatsi bwa infragre. Nibintu bikoreshwa cyane muri plasma etching gazi munganda ziciriritse. Ni uruvange rwa tetrafluoromethane gaze-isukuye cyane na tetrafluoromethane gaze-isukuye cyane na ogisijeni-yuzuye cyane. Irashobora gukoreshwa cyane muri silicon, dioxyde ya silicon, nitride ya silicon, nikirahure cya fosifosilike. Kuzuza ibikoresho bya firime yoroheje nka tungsten na tungsten nabyo bikoreshwa cyane mugusukura hejuru yibikoresho bya elegitoroniki, kubyara izuba, tekinoroji ya laser, gukonjesha ubushyuhe buke, kugenzura kumeneka, hamwe nogukoresha ibikoresho byacapwe. Ikoreshwa nka firigo yo hasi yubushyuhe na plasma yumye ya tekinoroji yumuzunguruko. Icyitonderwa cyo kubika: Bika mu bubiko bukonje, buhumeka butabikwa. Irinde umuriro nubushyuhe. Ubushyuhe bwo kubika ntibugomba kurenga 30 ° C. Igomba kubikwa ukwayo kuva byoroshye (gutwikwa) gutwikwa na okiside, kandi ikirinda ububiko buvanze. Ahantu ho kubika hagomba kuba hafite ibikoresho byihutirwa byihutirwa.

Gusaba:

① Firigo:

Tetrafluoromethane rimwe na rimwe ikoreshwa nka firigo yo hasi.

Etching:

Ikoreshwa muri electronics microfabrication yonyine cyangwa ifatanije na ogisijeni nka plasma etchant ya silicon, dioxyde ya silicon, na nitride ya silicon.

Porogaramu isanzwe:

Ibyiza:

Isuku ryinshi, ibikoresho bigezweho;

②ISO ukora icyemezo;

Gutanga vuba;

Sisitemu imwe yo gusesengura sisitemu yo kugenzura ubuziranenge muri buri ntambwe;

RequirementIbisabwa byinshi hamwe nuburyo bwitondewe bwo gukora silinderi mbere yo kuzuza;