Muburyo bwo gukora semiconductor waffer wafatiwe hamwe na gahunda yateye imbere, ubwoko bwa gaze 50 butandukanye burakenewe. Imyuka muri rusange igabanijwemo imyuka nini kandiimyuka idasanzwe.

Gushyira mu bikorwa imyuka muri microelectronics na semiconductor inganda zikoreshwa na gaze zahoraga zigira uruhare runini muri gahunda ya semiconductor, cyane cyane inzira ya semiconductor ikoreshwa cyane mu nganda zitandukanye. Kuva Ulsi, TFT-LCD kuri konti ya micro-electromen

Kurugero, abantu benshi bazi ko chipi ikozwe mumucanga, ariko igareba inzira yose yo gukora, nka popitine, amazi yo gusomana, ibikoresho byintego, etc. ni ngombwa. Gupakira inyuma nabyo bisaba kandi gusimburana, abaterankunga, kuyobora amakadiri, ibikoresho byo guhuza, nibindi. Ibikoresho bitandukanye. Imyuka idasanzwe ya elegitoronike ni ibintu bya kabiri binini mubiciro bya semiconductor nyuma yimodoka nyuma ya silicon, hakurikiraho masike na fotosiste.

Isuku ya gaze ifite uruhare rukomeye kubikorwa byimikorere nibicuruzwa bitanga umusaruro, kandi umutekano wa gazi ujyanye nubuzima bwabakozi n'umutekano wibikorwa byuruganda. Kuki isuku ya gaze ifite ingaruka zikomeye kumurongo wumurimo nabakozi? Ntabwo ari ugukabya, ariko bigenwa nibiranga akaga bya gaze ubwayo.

Gutondekanya imyuka isanzwe mu nganda za semiconductor

Gaze isanzwe

Gazi isanzwe nayo yitwa gaze nini: bivuga gaze yinganda hamwe ninganda zisabwa munsi ya 5n na umusaruro munini nibisasu. Irashobora kugabanywa gaze yo gutandukanya umwuka hamwe na gaze ya synthique ukurikije uburyo butandukanye bwo gutegura. Hydrogène (H2), azote (N2), Oxygene (OXY), ARGON (A2), nibindi .;

Gaze idasanzwe

Gazi yihariye yerekeza kuri gaze yinganda ikoreshwa mumirima yihariye kandi ifite ibisabwa byihariye kugirango byererwe, bitandukanye, numutungo. AhaniniSih4, PH3, B2h6, A8h3,HCL, Cf4,Nh3, Pocl3, Sih2cl2, Sihcl3,Nh3, BCL3, Sif4, CLF3, CLON, C2F6, N2O, F2, HF, HBR,Sf6... Kandi rero.

Ubwoko bwa gaze ya spicial

Ubwoko bwimyenda idasanzwe: ruswa, uburozi, bwaka, gutwika - gushyigikira, inert, nibindi.
Mubisanzwe wakoreshejwe gaze ya semiconductor ishyirwa mubikorwa nkibi bikurikira:
(i) BORROSIVE / Uburozi:HCL, BF3, WF6, HBR, SIH2CL2, NH3, PH3, CL2,BCL3...
(ii) Akaba: H2,Ch4,Sih4, PH3, Ash3, Sih2cl2, B2H6, Ch2f2, CH3F, CO ...
(iii) yaka: o2, CL2, N2O, NF3 ...
(iv) inert: N2,Cf4, C2F6,C4f8,Sf6, CO2,Ne,Kr, We ...

Muburyo bwa chip ya semiconductor, hafi 50 zitandukanye za gaze idasanzwe (ivugwa nkimbwa zidasanzwe) zikoreshwa muri okiside, etching, gutera inshinge nibindi bikorwa, kandi inzira zose zintambwe zirenze amajana. Kurugero, PH3 na Ash3 bikoreshwa nkibihugu bya fosipi na Arsenic muri Ions Stlantation, imyuka ishingiye kuri FF4, BBLE3, HBS, HBR irakoreshwa muburyo bwa firime, F.

Duhereye kuri ibirenze, dushobora kumva ko imyuka myinshi ya semiconductor yangiza umubiri wumuntu. By'umwihariko, imirasiri imwe, nka Sih4, zirimo gutwika. Igihe cyose bamenetse, bazabyitwaramo cyane ogisijeni mu kirere bagatangira gutwika; na Ash3 ni uburozi cyane. Ikintu icyo ari cyo cyose gishobora kwangiza ubuzima bwabantu, niko ibisabwa kumutekano wibishushanyo mbonera bya sisitemu yo gukoresha imyuka idasanzwe ni hejuru cyane.

Semicondu gutsindira bisaba imyuka ituje cyane kugira "impamyabumenyi eshatu"

Isuku

Ibikubiye mu kirere cyanduye muri gaze ubusanzwe bigaragazwa nk'ijanisha rya gaze isuku, nka 99.9999%. Muri rusange, icyifuzo cyo kwezwa ku myuga idasanzwe ya elegitoronike igera kuri 5n-6n, kandi igaragazwa na gahunda y'ijwi ry'ikigereranyo cyanduye ppm (igice kuri miliyoni), na PPT (igice kuri tiriyari). Umwanya wa elegitoroniki semiconductor afite ibisabwa byinshi kugirango isuku nubuziranenge bwimiterere idasanzwe ya imyuka idasanzwe, kandi ubuziranenge bwa gaze idasanzwe ya elegitoronike muri rusange irenze 6n.

Kuma

Ibikubiye mu mazi muri gaze, cyangwa ubushuhe, ubusanzwe bigaragarira mu kibanza, nk'ikirere cya Atmospheric, kimwe cyagenwe --70 ℃.

Isuku

Umubare wibice byanduye muri gaze, ibice hamwe nubunini bwa μm, bigaragazwa muburyo bukoreshwa / m3. Ku ihuriro rifunzwe, ubusanzwe ryerekanwa muri MG / M3 y'ibisigisigi bidafite intungane, bikubiyemo ibikubiyemo.