Mubikorwa byo gukora inganda za semiconductor wafer zifite umusaruro ugereranije niterambere, harakenewe ubwoko bwa gazi hafi 50. Imyuka isanzwe igabanijwemo imyuka myinshi kandiimyuka idasanzwe.

Ikoreshwa rya gaze munganda ziciriritse ninganda zikoresha imashanyarazi Ikoreshwa rya gaze ryagiye rigira uruhare runini mubikorwa bya semiconductor, cyane cyane inzira ya semiconductor ikoreshwa cyane mubikorwa bitandukanye. Kuva kuri ULSI, TFT-LCD kugeza kuri micro-electromechanical (MEMS) inganda zigezweho, inzira ya semiconductor ikoreshwa nkibikorwa byo gukora ibicuruzwa, birimo gukama byumye, okiside, gushiramo ion, gushira firime yoroheje, nibindi.

Kurugero, abantu benshi bazi ko chip ikozwe mumucanga, ariko urebye inzira yose yo gukora chip, harakenewe ibikoresho byinshi, nka Photoresist, polishing fluid, ibikoresho bigenewe, gaze idasanzwe, nibindi nibyingenzi. Gupakira inyuma-bisaba kandi substrate, interposers, ama frame yo kuyobora, ibikoresho byo guhuza, nibindi bikoresho bitandukanye. Imyuka idasanzwe ya elegitoronike nicyo kintu cya kabiri kinini mu bikoresho byo gukora semiconductor nyuma yo gukora wafer ya silicon, ikurikirwa na masike hamwe nabafotora.

Isuku ya gaze igira ingaruka zikomeye kumikorere yibicuruzwa n'umusaruro wibicuruzwa, kandi umutekano wogutanga gaze ujyanye nubuzima bwabakozi numutekano wibikorwa byuruganda. Kuki isuku ya gaze igira ingaruka zikomeye kumurongo wibikorwa n'abakozi? Ntabwo ari ugukabya, ahubwo bigenwa nibiranga gaze ubwayo.

Gutondekanya imyuka isanzwe munganda ziciriritse

Gazi isanzwe

Gazi isanzwe nayo yitwa gaze nini: bivuga gazi yinganda zifite isuku iri munsi ya 5N nubunini bunini n’ibicuruzwa. Irashobora kugabanywamo gaze yo gutandukanya ikirere na gaze ya sintetike ukurikije uburyo butandukanye bwo gutegura. Hydrogen (H2), azote (N2), ogisijeni (O2), argon (A2), nibindi.;

Gazi yihariye

Gazi yihariye bivuga gaze munganda zikoreshwa mumirima yihariye kandi ifite ibisabwa byihariye kubisukuye, bitandukanye, nibintu. AhaniniSiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… Nibindi.

Ubwoko bwa gaze zidasanzwe

Ubwoko bwa gaze zidasanzwe: kubora, uburozi, gutwikwa, gushyigikira-gutwika, inert, nibindi.
Imyuka ikoreshwa cyane ya semiconductor yashyizwe muburyo bukurikira:
(i) Kubora / uburozi:HCl、 BF3 、 WF6 、 HBr 、 SiH2Cl2 、 NH3 、 PH3 、 Cl2 、BCl3…
(ii) Yaka: H2 、CH4、SiH4、 PH3 、 AsH3 、 SiH2Cl2 、 B2H6 、 CH2F2 、 CH3F 、 CO…
(iii) Yaka: O2 、 Cl2 、 N2O 、 NF3…
(iv) Inert: N2 、CF42 C2F6 、C4F8、SF62 CO2 、Ne、Kr、 We…

Mubikorwa byo gukora chip ya semiconductor, amoko agera kuri 50 atandukanye ya gaze yihariye (byitwa gaze idasanzwe) akoreshwa muri okiside, gukwirakwiza, kubitsa, kuribwa, gutera inshinge, gufotora no mubindi bikorwa, kandi intambwe zose zikorwa zirenga amagana. Kurugero, PH3 na AsH3 bikoreshwa nka fosifore nisoko ya arsenic mugikorwa cyo gutera ion, imyuka ya F ishingiye kuri CF4, CHF3, SF6 hamwe na gaze ya halogene CI2, BCI3, HBr ikoreshwa muburyo bwo gutema, SiH4, NH3, N2O muri uburyo bwa firime yo kubitsa, F2 / Kr / Ne, Kr / Ne muburyo bwo gufotora.

Duhereye ku ngingo zavuzwe haruguru, dushobora kumva ko imyuka myinshi ya semiconductor yangiza umubiri wumuntu. By'umwihariko, imyuka imwe n'imwe, nka SiH4, iritwika. Igihe cyose zimenetse, zizitwara cyane hamwe na ogisijeni mu kirere hanyuma zitangire kwaka; na AsH3 ni uburozi bukabije. Kumeneka kwose gushobora guteza ibyago mubuzima bwabantu, bityo rero ibisabwa kumutekano wa sisitemu yo kugenzura ikoreshwa rya gaze zidasanzwe ni nyinshi cyane.

Semiconductor isaba imyuka ihumanya cyane kugira "dogere eshatu"

Umwuka wa gaze

Ibirimo ikirere cyanduye muri gaze mubisanzwe bigaragazwa nkijanisha ryubuziranenge bwa gaze, nka 99,9999%. Muri rusange, ibisabwa kugirango isuku ya gaze idasanzwe ya elegitoronike igera kuri 5N-6N, kandi igaragazwa nubunini bwikigereranyo cyibintu byanduye byumwuka ppm (igice kuri miriyoni), ppb (igice kuri miliyari), na ppt (igice kuri tiriyari). Umwanya wa elegitoroniki ya semiconductor ufite ibisabwa cyane kugirango ubuziranenge nubuziranenge bwa gaze zidasanzwe, kandi ubuziranenge bwa gaze idasanzwe ya elegitoronike muri rusange burenze 6N.

Kuma

Ibiri mu mazi ya gaze muri gaze, cyangwa ubushuhe, mubisanzwe bigaragarira ahantu h'ikime, nk'ikime cyo mu kirere -70 ℃.

Isuku

Umubare wibyuka bihumanya muri gaze, ibice bifite ubunini bwa µm, bigaragarira mubice bingahe / M3. Ku mwuka ucanye, ubusanzwe bigaragarira muri mg / m3 by'ibisigisigi bikomeye bidashobora kwirindwa, birimo amavuta.