Mu gikorwa cyo gukora uruganda rwa semiconductor wafer rufite uburyo bugezweho bwo gukora, hakenewe ubwoko butandukanye bwa gaze hafi 50. Gaze muri rusange zigabanyijemo gaze nyinshi naimyuka yihariye.

Ikoreshwa ry'imyuka mu nganda za microelectronics na semiconductor Ikoreshwa ry'imyuka ryagiye rigira uruhare runini mu nganda za semiconductor, cyane cyane inganda za semiconductor zikoreshwa cyane mu nganda zitandukanye. Kuva kuri ULSI, TFT-LCD kugeza ku nganda za micro-electromechanical (MEMS) zikoreshwa ubu, inganda za semiconductor zikoreshwa nk'inganda zikora ibicuruzwa, harimo gusya byumye, oxidation, ishyirwa rya ion, thin film deposition, nibindi.

Urugero, abantu benshi bazi ko ibishishwa bikozwe mu mucanga, ariko urebye inzira yose yo gukora ibishishwa, hakenewe ibikoresho byinshi, nka fotoresisti, polishing liquid, target material, special gas, nibindi ni ngombwa. Gupakira inyuma bisaba kandi substrates, interposer, lead frames, bonding materials, nibindi byibikoresho bitandukanye. Imyuka yihariye ya elegitoroniki ni yo ya kabiri mu bikoresho binini mu gukora semiconductor nyuma ya silicon wafers, hagakurikiraho masks na photoresistists.

Ubuziranenge bwa gazi bufite ingaruka zikomeye ku mikorere y'ibice byayo n'umusaruro wayo, kandi umutekano w'itangwa rya gazi ufitanye isano n'ubuzima bw'abakozi n'umutekano w'imikorere y'uruganda. Kuki ubuziranenge bwa gazi bugira ingaruka zikomeye ku murongo w'ibikorwa n'abakozi? Ibi si ugukabya, ahubwo bigenwa n'imiterere y'akaga ya gazi ubwayo.

Gushyira mu byiciro imyuka isanzwe mu nganda za semiconductor

Gazi isanzwe

Gazi isanzwe yitwa kandi gaze nini: yerekeza kuri gaze y'inganda ifite isuku nke iri munsi ya 5N n'ingano nini y'umusaruro n'igurishwa. Ishobora kugabanywamo gaze itandukanya umwuka n'gaze y'ubukorano hakurikijwe uburyo butandukanye bwo kuyitegura. Hydrogen (H2), azote (N2), ogisijeni (O2), argon (A2), n'ibindi;

Gazi yihariye

Gazi yihariye yerekeza kuri gaze y'inganda ikoreshwa mu nzego runaka kandi ifite ibisabwa byihariye ku isuku, ubwoko n'imiterere.SiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6... n'ibindi.

Ubwoko bw'imyuka ihumanya

Ubwoko bw'imyuka yihariye: ihumanya, ihumanya, ishobora gushya, ishyigikira gutwika, idafite umwuka, n'ibindi.
Imyuka ikoreshwa muri semiconductor ikunze gushyirwa mu byiciro bikurikira:
(i) Ingiza/ihumanya:HCl、BF3、WF6、HBr、SiH2Cl2、NH3、PH3、Cl2、BCl3…
(ii) Ishobora gushya: H2、CH4、SiH4、 PH3 、 AsH3 、 SiH2Cl2 、 B2H6 、 CH2F2 、 CH3F 、 CO…
(iii) Ishobora gushya: O2、Cl2、N2O、NF3…
(iv) Idafite aho ihuriye: N2,CF4、C2F6、C4F8、SF6CO2,Ne、Kr、Yewe…

Mu gikorwa cyo gukora utubumbe duto tw’imashini zikora ibikoresho bya elegitoroniki, ubwoko bugera kuri 50 butandukanye bwa gaze zidasanzwe (zitwa gaze zidasanzwe) zikoreshwa mu gusiga, gukwirakwiza, gushyiramo, gusya, gutera, gushushanya, gushushanya n’izindi nzira, kandi intambwe zose zikoreshwa zirenga amagana. Urugero, PH3 na AsH3 bikoreshwa nk’isoko ya fosifore na arsenic mu gikorwa cyo gutera iyoni, gaze zishingiye kuri F CF4, CHF3, SF6 na gaze halogen CI2, BCI3, HBr zikoreshwa cyane mu gikorwa cyo gusya, SiH4, NH3, N2O mu gikorwa cyo gushyiramo filime, F2/Kr/Ne, Kr/Ne mu gikorwa cyo gushushanya.

Duhereye kuri ibi byavuzwe haruguru, dushobora kumva ko imyuka myinshi ya semiconductor yangiza umubiri w'umuntu. By'umwihariko, imwe muri iyo myuka, nka SiH4, yiyatsa ubwayo. Igihe cyose iva, izagira ingaruka zikomeye hamwe na ogisijeni mu kirere igatangira gushya; kandi AsH3 ni uburozi bukomeye. Gusohoka gato bishobora kwangiza ubuzima bw'abantu, bityo ibisabwa kugira ngo imiterere y'uburyo bwo kugenzura ikoreshwa ry'imyuka yihariye ikomeze kubungabungwa ni byinshi cyane.

Semiconductors zisaba imyuka ifite isuku nyinshi kugira ngo ibe ifite "dogere eshatu"

Isuku ya gazi

Ibikubiye mu mwuka w’umwanda muri gazi bikunze kugaragazwa nk’ijanisha ry’umwuka mwiza, nka 99.9999%. Muri rusange, isuku isabwa kuri gazi zidasanzwe zikoreshwa mu byuma bikoresha ikoranabuhanga igera kuri 5N-6N, kandi igaragazwa n’ingano y’umwuka mubi ukoreshwa mu byuma bikoresha ppm (igice kuri miliyoni), ppb (igice kuri miliyari), na ppt (igice kuri tiriyari). Ishami rya semiconductor rikoresha ikoranabuhanga rifite ibisabwa cyane kugira ngo gazi zidasanzwe zigire ubuziranenge n’ubuziranenge, kandi ubuziranenge bwa gazi zidasanzwe zikoreshwa mu byuma bikoresha ikoranabuhanga muri rusange buruta 6N.

Kuma

Ingano y'amazi make ari muri iyo gaze, cyangwa ubushuhe, ikunze kugaragara mu gice cy'ikime, nko mu gice cy'ikime cy'ikirere -70℃.

Isuku

Umubare w'uduce twanduza umwuka, uduce dufite ingano ya µm, ugaragazwa mu mubare w'uduce / M3. Ku mwuka ufunze, ukunze kugaragara muri mg / m3 y'ibisigazwa bikomeye bidasubirwaho, birimo n'ibinure.