Gukoresha Tungsten Hexafluoride (WF6)

Tungsten Hexafluoride (WF6) ishyirwa hejuru ya Wafer binyuze muburyo bwa CVD, yuzuza imyuka ihuriweho n'icyuma, kandi ikora imiyoboro y'icyuma hagati y'ibice.

Reka tubanje kuganira kuri plasma. Plasma nuburyo bwikintu gigizwe ahanini na electron yubusa kandi ishinga amategeko ion. Irahari cyane mu isanzure kandi ikunze gufatwa nkikibazo cya kane cyikibazo. Yitwa Leta ya Plasma, nanone yitwa "Plasma". Plasma ifite imishinga myinshi y'amashanyarazi kandi ifite ingaruka zikomeye ku bijyanye na electomagnetic. Ni gaze ya ionised igice, igizwe na electron, ion, imirasire yubusa, ibice bitabogamiye, nibishusho. Ikipe ubwayo ni imvange itabogamye ikubiyemo ibice byumubiri no kumubiri.

Ibisobanuro bigaragara neza ni uko mu bikorwa by'ingufu nyinshi, Molekile azatsinda ingufu z'ingufu z'imiti, imbaraga z'imiti n'uruhu rw'umuti na coulon, kandi bagatanga amashanyarazi adafite aho abogamiye muri rusange. Muri icyo gihe, ingufu nyinshi zatanzwe nuwari hanze zatsinze ingabo eshatu zavuzwe haruguru. Imikorere, electron na ions tanga leta yubuntu, zirashobora gukoreshwa muburyo bwubuntu mu guhindura umurima wa magneti, nka semiconductor gahunda ya etching, CVD, PVD kandi ni gahunda.

Ingufu nyinshi ni iki? Mu nyigisho, ubushyuhe bwinshi hamwe ninshuro nyinshi rf irashobora gukoreshwa. Muri rusange, ubushyuhe bwinshi ntibushoboka kubigeraho. Ubu bushyuhe busabwa ni hejuru cyane kandi birashobora kuba hafi yubushyuhe bwizuba. Birashoboka cyane ko bidashoboka kubigeraho. Kubwibyo, u Rwanda mubisanzwe rukoresha hejuru-inshuro nyinshi rf kubigeraho. Plasma RF irashobora kugera hejuru ya 13mhz +.

Tungsten Hexafluoride ni plasmaimed munsi yumurima wamashanyarazi, hanyuma akayuzuzanya-yashyizwe kumurongo wa rukuruzi. W atom isa nimababa yimbeba no kugwa hasi munsi yuburemere. Buhorobuhoro, W atome yashyizwe mu mwobo, kandi amaherezo yuzuye mu mwobo kugirango ikore ibyuma. Usibye kubitsa W atom mu mwobo, bazashyirwa hejuru ya wafer? Yego, byanze bikunze. Muri rusange, urashobora gukoresha inzira ya W-CMP, aribyo twita inzira yo gusya kugirango dukureho. Birasa no gukoresha sima kugirango ukure hasi nyuma yurubura ruremereye. Urubura hasi rwatwawe, ariko urubura mu mwobo hasi ruzagumaho. Hasi, hafi kimwe.