Gukoresha tungsten hexafluoride (WF6)

Tungsten hexafluoride (WF6) ishyirwa hejuru ya wafer ikoresheje inzira ya CVD, yuzuza imiyoboro ihuza ibyuma, kandi ikora ibyuma bihuza ibice.

Reka tubanze tuvuge kuri plasma. Plasma nuburyo bwibintu bigizwe ahanini na electron yubusa hamwe na ion zishyuzwa. Ibaho cyane mu isanzure kandi ikunze gufatwa nkikintu cya kane cyibintu. Yitwa leta ya plasma, nayo yitwa "Plasma". Plasma ifite amashanyarazi menshi kandi ifite ingaruka zikomeye zo guhuza amashanyarazi. Ni gazi ioni igice, igizwe na electron, ion, radicals yubusa, ibice bitagira aho bibogamiye, na fotone. Plasma ubwayo nuruvange rutabogamye rwamashanyarazi rurimo ibice byumubiri na chimique.

Ibisobanuro bitomoye ni uko mugukoresha ingufu nyinshi, molekile izatsinda ingufu za der der Waals, ingufu za chimique nimbaraga za Coulomb, ikanerekana uburyo bwamashanyarazi atabogamye muri rusange. Muri icyo gihe, ingufu nyinshi zitangwa hanze zitsinda imbaraga eshatu zavuzwe haruguru. Imikorere, electron na ion byerekana leta yubuntu, ishobora gukoreshwa muburyo bwoguhindura imbaraga za magnetique, nka semiconductor etching process, CVD process, PVD na IMP.

Ingufu nyinshi ni iki? Mubyigisho, byombi ubushyuhe bwo hejuru hamwe numurongo mwinshi RF irashobora gukoreshwa. Muri rusange, ubushyuhe bwo hejuru ntibishoboka kubigeraho. Ubu bushyuhe bukenewe cyane kandi burashobora kuba hafi yubushyuhe bwizuba. Ntabwo bishoboka rwose kubigeraho mubikorwa. Kubwibyo, inganda zikunze gukoresha RF-yumurongo mwinshi kugirango ubigereho. Plasma RF irashobora kugera kuri 13MHz +.

Tungsten hexafluoride yatewe plasma ikorwa numurima wamashanyarazi, hanyuma igashyirwa mubyuka n'umuriro wa rukuruzi. W atom isa namababa yingagi yimbeho ikagwa hasi munsi yuburemere. Buhorobuhoro, W atom zishirwa mumyobo, hanyuma zuzura Byuzuye binyuze mumyobo kugirango habeho guhuza ibyuma. Usibye kubitsa W atom mu mwobo, bizanashyirwa hejuru ya Wafer? Yego rwose. Mubisanzwe nukuvuga, urashobora gukoresha inzira ya W-CMP, aricyo twita uburyo bwo gusya imashini kugirango dukureho. Birasa no gukoresha sima kugirango ukure hasi nyuma yurubura rwinshi. Urubura hasi rwatwarwe, ariko urubura mu mwobo hasi ruzagumaho. Hasi, hafi kimwe.