Imikoreshereze ya tungsten hexafluoride (WF6)

Tungsten hexafluoride (WF6) ishyirwa hejuru y'umugati binyuze mu buryo bwa CVD, yuzuza imiyoboro y'ibyuma, hanyuma igakora icyuma gihuza ibice.

Reka tuvuge ku birebana na plasma. Plasma ni ubwoko bw'ibintu bigizwe ahanini na electron zigenga na iyoni zishyuwe. Iboneka cyane mu isanzure kandi ikunze gufatwa nk'imimerere ya kane y'ibintu. Yitwa plasma state, yitwa kandi "Plasma". Plasma ifite amashanyarazi menshi kandi ifite ingaruka zikomeye zo guhuza n'umurima wa electromagnetic. Ni gaze ifite igice cya iyoni, igizwe na electron, iyoni, radicals yigenga, uduce duto, na fotoni. Plasma ubwayo ni uruvange rw'amashanyarazi rudafite aho rubogamiye rurimo uduce duto dukora ku mubiri no mu bya shimi.

Igisobanuro cyoroshye ni uko iyo molekile ikoreshejwe ingufu nyinshi, izatsinda imbaraga za van der Waals, imbaraga z'imibanire ya shimi n'imbaraga za Coulomb, kandi igaragaze ubwoko bw'amashanyarazi atagira aho ahuriye n'ingufu zose. Muri icyo gihe, ingufu nyinshi zitangwa n'inyuma zitsinda imbaraga eshatu zavuzwe haruguru. Imikorere, electron na iyons bitanga imiterere y'ubwisanzure, ishobora gukoreshwa mu buryo bw'ubukorano munsi y'uburyo bwa rukuruzi, nko gushushanya semiconductor, CVD, PVD na IMP.

Ingufu nyinshi ni iki? Muri rusange, ubushyuhe bwinshi na RF bishobora gukoreshwa. Muri rusange, ubushyuhe bwinshi biragoye kubigeraho. Ubushyuhe burenze urugero kandi bushobora kuba buri hafi y'ubushyuhe bw'izuba. Mu by'ukuri ntibishoboka kubigeraho muri icyo gikorwa. Bityo, inganda zikoresha RF ifite frequency nyinshi kugira ngo zibigereho. Plasma RF ishobora kugera kuri 13MHz+.

Hexafluoride ya Tungsten ishyirwa mu maraso bitewe n’umurima w’amashanyarazi, hanyuma igashyirwa mu mwuka w’amashanyarazi. Atome za W zisa n’ubwoya bw’ingagi z’igihe cy’itumba kandi zigwa hasi bitewe n’imbaraga rukuruzi. Buhoro buhoro, atome za W zishyirwa mu myobo, hanyuma zigashyirwa mu myobo yuzuye kugira ngo habeho ibyuma bihuza. Uretse gushyira atome za W mu myobo, ese zizashyirwa no ku buso bwa Wafer? Yego rwose. Muri rusange, ushobora gukoresha inzira ya W-CMP, ari nayo twita inzira yo gusya ikoresheje ikoranabuhanga kugira ngo ukureho. Bisa no gukoresha umuhumyo kugira ngo uhukure hasi nyuma y’urubura rwinshi. Urubura ruri ku butaka ruratwarwa, ariko urubura ruri mu mwobo uri ku butaka ruzagumaho. Hasi, hafi kimwe.