Gukoresha tungsten hexafluoride (WF6)

Tungsten hexafluoride (WF6) ishyirwa hejuru ya wafer ikoresheje inzira ya CVD, yuzuza imiyoboro ihuza ibyuma, kandi ikora ibyuma bihuza ibice.

Reka tubanze tuvuge kuri plasma.Plasma nuburyo bwibintu bigizwe ahanini na electroni yubusa hamwe na ion zishyuzwa.Ibaho cyane mu isanzure kandi ikunze gufatwa nkikintu cya kane cyibintu.Yitwa plasma leta, nanone yitwa "Plasma".Plasma ifite amashanyarazi menshi kandi ifite imbaraga zo guhuza hamwe na electronique.Ni gazi ioni igice, igizwe na electron, ion, radicals yubusa, ibice bitagira aho bibogamiye, na fotone.Plasma ubwayo nuruvange rutabogamye rwamashanyarazi rurimo ibice byumubiri na chimique.

Ibisobanuro byeruye ni uko mugukoresha ingufu nyinshi, molekile izatsinda imbaraga za van der Waals, imiti ihuza imiti nimbaraga za Coulomb, ikanerekana uburyo bwamashanyarazi atabogamye muri rusange.Mugihe kimwe, imbaraga nyinshi zitangwa hanze zitsinda imbaraga eshatu zavuzwe haruguru.Imikorere, electron na ion byerekana leta yubuntu, ishobora gukoreshwa muburyo bwogukoresha munsi ya magnetique, nka semiconductor etching process, CVD inzira, PVD na IMP.

Ingufu nyinshi ni iki?Mubyigisho, byombi ubushyuhe bwo hejuru hamwe numurongo mwinshi RF irashobora gukoreshwa.Muri rusange, ubushyuhe bwo hejuru ntibushoboka kubigeraho.Ubu bushyuhe bukenewe cyane kandi burashobora kuba hafi yubushyuhe bwizuba.Ntabwo bishoboka rwose kubigeraho mubikorwa.Kubwibyo, inganda zisanzwe zikoresha umurongo wa radiyo mwinshi kugirango ubigereho.Plasma RF irashobora kugera kuri 13MHz +.

Tungsten hexafluoride ihindurwamo imbaraga zumurima wamashanyarazi, hanyuma igashyirwa mubyuka n'umuriro wa rukuruzi.W atom isa namababa yingagi yimbeho ikagwa hasi munsi yuburemere.Buhorobuhoro, W atom zishirwa mumyobo, hanyuma zuzura Byuzuye binyuze mumyobo kugirango habeho guhuza ibyuma.Usibye kubitsa W atom mumyobo, bazanashyirwa hejuru ya Wafer?Yego rwose.Mubisanzwe, urashobora gukoresha inzira ya W-CMP, nibyo twita uburyo bwo gusya bwo gukuraho.Birasa no gukoresha sima kugirango ukure hasi nyuma yurubura rwinshi.Urubura hasi ruratwarwa, ariko urubura mu mwobo hasi ruzagumaho.Hasi, hafi kimwe.


Igihe cyo kohereza: Ukuboza-24-2021

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